Author:
Foad M.A.,Smart A.P.,Watt M.,Sotomayor Torres C.M.,Wilkinson C.D.W.
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Reference11 articles.
1. Wilkinson, C.D.W., and Beaumont, S.P.: ‘Electron beam nanolithography’, Whisbuch, C., Kelly, M.J., The physics and fabrication of microstructures and microdevices, (Springer 1986)
2. Sze, S.M.: VLSI technology, 2nd edn(McGraw-Hill inter. Ed. 1988)
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