Influence of nitrogen flow ratio on the optical property of AlN deposited by DC magnetron sputtering on Si (100) substrate-Reference-Cited by-同舟云学术

Influence of nitrogen flow ratio on the optical property of AlN deposited by DC magnetron sputtering on Si (100) substrate

Published:2020-07 Issue:8 Volume:15 Page:556-560
ISSN:1750-0443
Container-title:Micro & Nano Letters
language:en
Short-container-title:Micro & Nano Letters

Author:

Han Jun¹,Cui Boyao¹,Xing Yanhui¹,Li Tao¹,Zhao Jiahao¹,Cao Xu¹,Zhang Yao¹,Zhang Baoshun²

Affiliation:

1. Key Laboratory of Opto‐electronics TechnologyMinistry of EducationDepartment of InformaticsBeijing University of TechnologyBeijing100124People's Republic of China

2. Key Laboratory of Nanodevices and ApplicationsSuZhou Institute of Nano‐tech and Nano‐bionicsCASSuZhou215123People's Republic of China

Funder

Natural Science Foundation of Beijing Municipality

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/mnl.2019.0767

Reference35 articles.

1. Ultraviolet light-emitting diodes based on group three nitrides

2. A rotational piezoelectric energy harvester for efficient wind energy harvesting;Zhang J.;Sens. Actuators A,2017

3. Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications

4. Characterization of highly textured piezoelectric AlN films obtained from aluminum and ammonium chloride by a simple vapor deposition process

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1. Structural and Optical Properties of Aluminium Nitride Thin Films Fabricated Using Pulsed Laser Deposition and DC Magnetron Sputtering on Various Substrates;Advances in Materials Science;2024-03-01

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5. Influence of Pulsed DC Sputtering Power on the Quality and Residual Stress of AlN Films on Si (100) Substrates;Crystal Research and Technology;2022-02-27