Highly textured growth of AlN films on sapphire by magnetron sputtering for high temperature surface acoustic wave applications
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.3551604
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3. FEM analysis of Pt/Scx Al1-x N/Al2 O3 One Port Surface Acoustic Wave Resonators;2022 2nd International Conference on Advanced Electrical Engineering (ICAEE);2022-10-29
4. Stress relaxation of three dimensional textured AlN films on sapphire substrate by rapid thermal annealing;Diamond and Related Materials;2021-10
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