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Low cross-axis sensitivity micro-gravity microelectromechanical system sandwich capacitance accelerometer

  • Published:2011 Issue:7 Volume:6 Page:510
  • ISSN:1750-0443
  • Container-title:Micro & Nano Letters
  • language:en
  • Short-container-title:Micro Nano Lett.

Author:

Hu Qifang,Gao Chengchen,Hao Yilong,Zhang Yangxi,Yang Gang

Publisher

Institution of Engineering and Technology (IET)

Subject

Condensed Matter Physics,General Materials Science,Biomedical Engineering,Bioengineering

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