A Full 3D Printing Method for Monolithic Integration of an Accelerometer and a Force Sensor-Reference-Cited by-同舟云学术

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A Full 3D Printing Method for Monolithic Integration of an Accelerometer and a Force Sensor

Published:2023-01-15 Issue: Volume: Page:
ISSN:
Container-title:2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
language:
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Author:

Liu Guandong¹,Wang Changhai¹,Wang Kexin¹,Jia Zhili²,Luo Ruiqi³,Ma Wei³

Affiliation:

1. Heriot-Watt University,Institute of Sensors, Signals and Systems, School of Engineering & Physical Sciences,Edinburgh,UK,EH14 4AS

2. National Institute of Metrology,Center for Advanced Measurement Science,Beijing,China,100029

3. Intelligent Network Research Institute,Zhejiang Lab,Hangzhou,China,311100

Funder

Engineering and Physical Sciences Research Council

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10052111/10052113/10052173.pdf?arnumber=10052173

Reference12 articles.

1. Customized production based on distributed 3D printing services in cloud manufacturing

2. A Metallographic Review of 3D Printing/Additive Manufacturing of Metal and Alloy Products and Components

3. Design, simulation and testing of electrostatic SOI MUMPs based microgripper integrated with capacitive contact sensor

4. Environmental Life Cycle Analysis of Distributed Three-Dimensional Printing and Conventional Manufacturing of Polymer Products

5. TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

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