Integrated robust tracking controller design for a developed precision planar motor with equivalent disturbances-Reference-Cited by-同舟云学术

Integrated robust tracking controller design for a developed precision planar motor with equivalent disturbances

Published:2016-06 Issue:9 Volume:10 Page:1009-1017
ISSN:1751-8652
Container-title:IET Control Theory & Applications
language:en
Short-container-title:IET Control Theory & Applications

Author:

Huang Tao¹²,Yang Kaimin¹²,Hu Chuxiong¹²,Zhu Yu¹²,Li Min¹²

Affiliation:

1. State Key Laboratory of TribologyDepartment of Mechanical EngineeringTsinghua UniversityBeijing100084People's Republic of China

2. Beijing Key Lab of Precision/Ultra‐Precision Manufacture Equipment and Control, Tsinghua UniversityBeijing100084People's Republic of China

Publisher

Institution of Engineering and Technology (IET)

Subject

Electrical and Electronic Engineering,Control and Optimization,Computer Science Applications,Human-Computer Interaction,Control and Systems Engineering

Link

https://onlinelibrary.wiley.com/doi/pdf/10.1049/iet-cta.2015.0435

Reference35 articles.

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3. The long‐range scanning stage: a novel platform for scanned‐probe microscopy;Holmes M.;Precis. Eng.,2000

4. Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages

5. Global Task Coordinate Frame-Based Contouring Control of Linear-Motor-Driven Biaxial Systems With Accurate Parameter Estimations

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