Feedback linearization and equivalent-disturbance compensation control strategy for piezoelectric stage

Author:

Huang Tao12ORCID,Wang Yingbin12,Luo Zhihong3,Cao Huajun12,Tao Guibao12,Ling Mingxiang4ORCID

Affiliation:

1. State Key Laboratory of Mechanical Transmissions for Advanced Equipment, Chongqing University 1 , Chongqing 400044, China

2. College of Mechanical and Vehicle Engineering, Chongqing University 2 , Chongqing 400044, China

3. Hongdu Aviation Industry Group 3 , Nanchang, Jiangxi 330000, China

4. Robotics and Microsystems Center, Soochow University 4 , Suzhou 215123, China

Abstract

Piezoelectric stages use piezoelectric actuators and flexure hinges as driving and amplifying mechanisms, respectively. These systems have high positioning accuracy and high-frequency responses, and they are widely used in various precision/ultra-precision positioning fields. However, the main challenge with these devices is the inherent hysteresis nonlinearity of piezoelectric actuators, which seriously affects the tracking accuracy of a piezoelectric stage. Inspired by this challenge, in this work, we developed a Hammerstein model to describe the hysteresis nonlinearity of a piezoelectric stage. In particular, in our proposed scheme, a feedback-linearization algorithm is used to eliminate the static hysteresis nonlinearity. In addition, a composite controller based on equivalent-disturbance compensation was designed to counteract model uncertainties and external disturbances. An analysis of the stability of a closed-loop system based on this feedback-linearization algorithm and composite controller was performed, and this was followed by extensive comparative experiments using a piezoelectric stage developed in the laboratory. The experimental results confirmed that the feedback-linearization algorithm and the composite controller offer improved linearization and trajectory-tracking performance.

Publisher

AIP Publishing

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. RBF Neural Networks Model-Free Feedforward Control of Piezoelectric Actuator;2024 9th International Conference on Automation, Control and Robotics Engineering (CACRE);2024-07-18

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