High-precision magnetic levitation stage for photolithography

Author:

Kim Won-jong,Trumper David L.

Publisher

Elsevier BV

Subject

General Engineering

Reference7 articles.

1. Kim, W.-J. “High-precision planar magnetic levitation.” Ph.D. thesis, Massachusetts Institute of Technology, Cambridge, MA, June 1997

2. Design and analysis framework for linear permanent-magnet machines;Trumper;IEEE Trans Ind Appl,1996

3. Design of permanent multipole magnets with oriented rare earth cobalt material;Halbach;Nucl Instrum Meth,1980

4. Linear-motor-levitated stage for photolithography;Kim;Ann CIRP,1997

5. Holmes, M. L., Hocken, R. J. and Trumper, D. L. “A long-range scanning stage (the LORS project),” Proceedings of 1997 ASPE annual meeting, October 1997

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