Low temperature photo-oxidation of silicon using deep UV radiation
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19961377?crawler=true&mimetype=application/pdf
Reference11 articles.
1. Magnetically Excited Plasma Oxidation of Si
2. Oxidation of silicon by a low‐energy ion beam: Experiment and model
3. Laser-induced oxidation of silicon
4. Vacuum-Ultra-Violet and Ozone Induced Oxidation of Silicon and Silicon-Germanium
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