Oxidation of silicon by a low‐energy ion beam: Experiment and model-Reference-Cited by-同舟云学术

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Oxidation of silicon by a low‐energy ion beam: Experiment and model

Published:1988-01-04 Issue:1 Volume:52 Page:48-50
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Todorov S. S.,Fossum E. R.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.99313

Reference7 articles.

1. Low-energy ion beam oxidation of silicon

2. and to be published in J. Vac. Sci. Techno1. B6, Jan./Feb. (1988).

3. Ion beam oxidation

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