Frequency domain reflectometry of Hitachi ECR plasma-tool
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_20063219?crawler=true&mimetype=application/pdf
Reference3 articles.
1. Rf probe technology for the next generation of technological plasmas
2. A frequency domain measurement diagnostic technique for plasma-tools
3. Dunwoodie, D.E., and Lacy, P.: ‘Why tolerate unnecessary measurement errors’, Wiltron Technical Review 1, 1975)
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