A frequency domain measurement diagnostic technique for plasma-tools
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Reference7 articles.
1. The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges
2. Frequency domain analysis of RF and microwave circuits using SPICE
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1. Measuring the dielectric properties of materials. Ninety-year development from low-frequency techniques to broadband spectroscopy and high-frequency imaging;Measurement Science and Technology;2012-12-03
2. Non-invasive VHF monitoring of low-temperature atmospheric pressure plasma;Plasma Sources Science and Technology;2010-05-21
3. Non-invasive VHF injected signal monitoring in atmospheric pressure plasma and axial DC magnetron;Vacuum;2008-01
4. Frequency domain reflectometry of plasma chambers;Vacuum;2007-03
5. Chlorine plasma system instabilities within an ICP tool driven at a frequency of 13.56 MHz;Plasma Sources Science and Technology;2006-02-24
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