Au metal-induced lateral crystallisation (MILC) of hydrogenated amorphous silicon thin film with very low annealing temperature and fast MILC rate
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19990743?crawler=true&mimetype=application/pdf
Reference7 articles.
1. Low temperature poly-Si thin-film transistor fabrication by metal-induced lateral crystallization
2. Fabrication of high-mobility p-channel poly-Si thin film transistors by self-aligned metal-induced lateral crystallization
3. Effects of longitudinal grain boundaries on the performance of MILC-TFTs
4. Crystallization of LPCVD Silicon Films by Low Temperature Annealing
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