Low temperature InP layer transfer
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19990226?crawler=true&mimetype=application/pdf
Reference9 articles.
1. Van der Waals bonding of GaAs epitaxial liftoff films onto arbitrary substrates
2. Gallium arsenide and other compound semiconductors on silicon
3. Transfer of 3 in GaAs film on silicon substrate by proton implantation process
4. A lower bound on implant density to induce wafer splitting in forming compliant substrate structures
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