Efficient heterogeneous integration of InP/Si and GaSb/Si templates with ultra-smooth surfaces-Reference-Cited by-同舟云学术

Efficient heterogeneous integration of InP/Si and GaSb/Si templates with ultra-smooth surfaces

Published:2022-06-27 Issue:8 Volume:65 Page:
ISSN:1674-733X
Container-title:Science China Information Sciences
language:en
Short-container-title:Sci. China Inf. Sci.

Author:

Jin Tingting,Lin Jiajie,You Tiangui,Zhang Xiaolei,Liang Hao,Zhu Yifan,Sun Jialiang,Shi Hangning,Chi Chaodan,Zhou Min,Kudrawiec Robert,Wang Shumin,Ou Xin

Publisher

Springer Science and Business Media LLC

Subject

General Computer Science

Link

https://link.springer.com/content/pdf/10.1007/s11432-021-3398-y.pdf

Reference36 articles.

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3. Fujii T, Takeda K, Nishi H, et al. Multiwavelength membrane laser array using selective area growth on directly bonded InP on SiO2/Si. Optica, 2020, 7: 838

4. Carter A D, Urteaga M E, Griffith Z M, et al. Q-band InP/CMOS receiver and transmitter beamformer channels fabricated by 3D heterogeneous integration. In: Proceedings of IEEE MTT-S International Microwave Symposium, 2017. 1760–1763

5. Jonsson A, Svensson J, Wernersson L E. A self-aligned gate-last process applied to all-III-V CMOS on Si. IEEE Electron Device Lett, 2018, 39: 935–938

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