Low temperature VUV-assisted oxidation of Ge
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19980072?crawler=true&mimetype=application/pdf
Reference9 articles.
1. Laser-induced oxidation of silicon
2. Vacuum-Ultra-Violet and Ozone Induced Oxidation of Silicon and Silicon-Germanium
3. Low temperature photo-oxidation of silicon using deep UV radiation
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3. On the Relationship between Nonstoichiometry and Passivity Breakdown in Ultrathin Oxides: Combined Depth-Dependent Spectroscopy, Mott−Schottky Analysis, and Molecular Dynamics Simulation Studies;The Journal of Physical Chemistry C;2009-02-06
4. Kinetics of visible light photo-oxidation of Ge nanocrystals: Theory and in situ measurement;Applied Physics Letters;2007-04-16
5. Neutron Reflectometry and Spectroscopic Ellipsometry Studies of Cross-Linked Poly(dimethylsiloxane) after Irradiation at 172 nm;Langmuir;2005-08-10
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