Wavelength dependence of optical oxidation of silicon
Author:
Publisher
Institution of Engineering and Technology (IET)
Subject
Electrical and Electronic Engineering
Link
https://digital-library.theiet.org/content/journals/10.1049/el_19870217?crawler=true&mimetype=application/pdf
Reference8 articles.
1. Boyd, I.W.: ‘Photoformation of silicon dielectrics’, Bentini, G.G., Fogarassy, E., Golanski, A., Dielectric layers in semiconductors, (Les Editions de Physique, France 1986),Proc. E-MRS
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