Doping and Oxidation-Reference-Cited by-同舟云学术

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Doping and Oxidation

Published:1989 Issue: Volume: Page:539-580
ISSN:
Container-title:Laser Microfabrication
language:
Short-container-title:

Author:

BOYD IAN W.

Publisher

Elsevier

Reference121 articles.

1. Properties of laser-assisted doping in silicon;Affolter;Appl. Phys. Lett.,1978

2. Composition of an oxide film formed after pulsed heating of a metal;Akimov;Sov. Phys. Tech. Phys.,1980

3. The relationship of oxide film thickness and composition of titanium to the absorption coefficient on laser irradiation in an oxidizing atmosphere;Akimov;Bull. Acad. USSR Phys. Ser.,1982

4. Non-thermal effects in laser assisted oxidation of thin metal processing;Andrew,1985

5. CW Ar+ laser induced oxidation of Cu layers;Andrew;Appl. Phys.,1986

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The Symbiosis of Light and Matter: Laser-Engineered Materials for Photo-Functionality;MRS Bulletin;2007-01

2. Optical characterization of laser processed ultra-shallow junctions;Applied Surface Science;2003-03

3. Ultra-shallow, super-doped and box-like junctions realized by laser-induced doping;Applied Surface Science;2002-01

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