Rapid Thermal Growth and Processing of Dielectrics
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Publisher
Elsevier
Reference153 articles.
1. For a review and general RTP liography, see for example;Singh;J. Appl. Phys,1988
2. Ionic Conductivity and Phase Transition of the Spinel System Li2 − 2x M 1 + x Cl4 ( M = Mg , Mn , Cd )
3. Rapid thermal processing of thin gate dielectrics. Oxidation of silicon
4. Thin SiO2insulators grown by rapid thermal oxidation of silicon
5. Limited Reaction Processing of Silicon: Oxidation and Epitaxy
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3. An XPS Study of Silicon Oxynitride Rapid Thermally Grown in Nitric Oxide;MRS Proceedings;1999
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