Exploration of Post-Cmp Cleaning - New Insights into the Synergistic Effect of Particle Removal of Surfactants in Citric Acid Based Systems: Experimental and Mechanistic Analysis
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Elsevier BV
Reference50 articles.
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4. Effect of corrosion inhibitor BTA on silica particles and their adsorption on copper surface in copper interconnection CMP;Y Wang;ECS J. Solid State Sci. Technol,2022
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