Application of Dry Nano Powder Inverse Imprint Technology in Transferring and Replication of Micro Patterns

Abstract

Abstract This research aims to develop a new dry nano powder inverse imprint technology, and probe into transferring and replication of micro patterns. First, a polydimethylsiloxane (PDMS) mould surface, with micro patterns of grating structures, undergo activation treatment with oxygen plasma in order to improve mould surface energy, and thus, spin coat photoresist onto the surface more easily. Then, the surface is heated to restore its hydrophobicity, and by means of nano powder, micro patterns are transfer printed onto the polymethylmethacrylate (PMMA). Research results show that dry nano powder soft coat transferring and forming technology can accurately reproduce the required patterns. In the experiment, gas assisted nano powder imprint technology is used to apply even pressure, coupled with even temperature rise for solidification, then, patterns can be effectively transfer printed and completely formed. Further, these patterns are in perfect contact with the PMMA surface, thus, greatly increasing the valid imprint area and enhancing transferring reproductiveness. The technology integrates technologies, such as, soft lithography, solidifying photoresist, and gas assisted pressure application, and is utilized to transfer print micro patterns in a grating structure, and thus, complete the transferring process of dry micro structure patterns.