Fabricating Nanostructures by Atomic Force Microscopy-Reference-Cited by-同舟云学术

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Fabricating Nanostructures by Atomic Force Microscopy

Published:2009-09-24 Issue:9 Volume:48 Page:095001
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Huang Jen-Ching,Weng Yung-Jin,Yang Sen-Yeu,Weng Yung-Chun,Wang Jui-Yang

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference23 articles.

1. Fabrication of buried waveguide microstructure using gas-assisted micro/nanoimprinting with soft mold

2. A study on the innovative microlens projection lithography applied to the production of microstructures

3. Fabrication of nanostructures using scanning probe microscope lithography

4. Photoinduced volume expansion and contraction in a-Si:H films

5. Nano-oxidation of Si using ac modulation in atomic force microscope lithography

Cited by 20 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Prediction Surface Morphology of Nanostructure Fabricated by Nano-Oxidation Technology;Materials;2015-12-04

2. The evaluation of nanotribological property of nano thin film under different environment by atomic force microscopy;Microsystem Technologies;2015-07-02

3. UV-Curable Technique of Magnetic Roller Soft Mold and Microstructure Pattern Replication;International Polymer Processing;2015-03-02

4. The Study on the Ultrasonic Nanomachining of Au/Ti Thin Film by Atomic Force Microscopy;Applied Mechanics and Materials;2014-09

5. The Study of Nanolithography Processing on the Photoresistor Thin Film by Atomic Force Microscopy;Advanced Materials Research;2014-08

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