Deflection Modelling of MEMS Cantilever Beam Through Collocation Method Taking B-Splinesas Approximating Functions

Abstract

The Mathematical Modeling and Analysis of cantilever beam adhesion problem, under the action of electrostatic attraction force iscarried out. The model uses Euler-Bernoulli beam theory for one end fixed and other end free type beams for small deflection. A MATLAB code has prepared to predict and plot the deflection profile of MEMS cantilever beam during the action of stiction force on application of applied voltage as snap down occurs. The model predicts the cantilever behavior on occurrence of snap downvoltage. To envisage the deflection profile, A collocation method employing B-Spline as approximating functions & Gaussian quadrature point as collocation points has been utilized for solving the governing equation by keeping the four end boundary conditions of cantilever beam in mind. The numerical results reveal the deflection profile of the MEMS cantilever Beam, which are validated with the previous data & deflection profile available by numerous published research papers