Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model-Reference-Cited by-同舟云学术

Modeling the pull-in parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model

Published:2002-04 Issue: Volume:97-98 Page:569-578
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bochobza-Degani Ofir,Nemirovsky Yael

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. S.D. Senturia, Microsystems Design, Kluwer Academic Publishers, Boston, 2000.

2. A methodology and model for the pull-in parameters of electrostatic actuators;Nemirovsky;JMEMS,2001

3. P.M. Osterberg, Electrostatically actuated microelectromechanical test structures for material property measurements, Ph.D. Thesis, Supervised by S.D. Senturia, MIT, September 1995.

4. R.K. Gupta, Electrostatic pull-in test structure design for in situ mechanical property measurements of microelectromechanical systems (MEMS), Ph.D. Thesis, Supervised by S.D. Senturia, MIT, June 1997.

5. MEMCAD™. http://www.coventor.com.

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