A New Analytical Model to Estimate the Voltage Value and Position of the Pull-In Limit of a MEMS Cantilever
Author:
Publisher
MDPI AG
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Control and Systems Engineering
Link
http://www.mdpi.com/2072-666X/7/4/53/pdf
Reference38 articles.
1. Novel full range vacuum pressure sensing technique using free decay of trapezoid micro-cantilever beam deflected by electrostatic force
2. A sensitivity comparison of three photoacoustic cells containing a single microphone, a differential dual microphone or a cantilever pressure sensor
3. Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever
4. Preparing of a high speed bistable electromagnetic RF MEMS switch
5. A Low-Voltage Actuated Micromachined Microwave Switch Using Torsion Springs and Leverage;Hah;IEEE Trans. Microw. Theory Technol.,2000
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