Thermodynamic Study on SiCl4 Hydrogenation System in Siemens Process-Reference-Cited by-同舟云学术

Thermodynamic Study on SiCl4 Hydrogenation System in Siemens Process

Published:2011 Issue:4 Volume:44 Page:214-223
ISSN:0021-9592
Container-title:JOURNAL OF CHEMICAL ENGINEERING OF JAPAN
language:en
Short-container-title:J. Chem. Eng. Japan

Author:

Hou Yanqing¹,Xie Gang¹²,Tao Dongping¹,Yu Xiaohua¹,Li Rongxing¹,Song Dongming¹³

Affiliation:

1. Faculty of Metallurgical and Energy Engineering, Kunming University of Science and Technology

2. Technolygy Center of Yunnan Metallurgy Group Co.

3. Kunming Yeyan New-Material Co., Ltd.

Publisher

Society of Chemical Engineers, Japan

Subject

General Chemical Engineering,General Chemistry

Link

http://www.jstage.jst.go.jp/article/jcej/44/4/44_10we327/_pdf

Reference17 articles.

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4. A Thorough Thermodynamic Evaluation of the Silicon-Hydrogen-Chlorine System

5. Kee, R. J., F. M. Rupley and J. A. Miller; “The Thermodynamic Data for Silanes and Chlorosilanes,” Sandia National Laboratories Report SAND, 87-8215B, 1–87 (1990)

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