Density evaluation of remotely-supplied hydrogen radicals produced via tungsten filament method for SiCl4 reduction-Reference-Cited by-同舟云学术

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Density evaluation of remotely-supplied hydrogen radicals produced via tungsten filament method for SiCl4 reduction

Published:2018-04-04 Issue:5 Volume:57 Page:051301
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Dahmani Fatima Zohra,Okamoto Yuji,Tsutsumi Daiki,Ishigaki Takamasa,Koinuma Hideomi,Hamzaoui Saad,Flazi Samir,Sumiya Masatomo

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/57/i=5/a=051301/pdf

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Epitaxial Thin Film Growth of Perovskite Hydrides MLiH₃ (M : Sr, Ba) for the Study of Intrinsic Hydride-Ion Conduction;ACS Applied Energy Materials;2024-03-25

2. Effective silicon production from SiCl4 source using hydrogen radicals generated and transported at atmospheric pressure;Science and Technology of Advanced Materials;2020-01-31

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