A square wave is the most efficient and reliable waveform for resonant actuation of micro switches
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Link
http://iopscience.iop.org/article/10.1088/1361-6439/aaad4b/pdf
Reference40 articles.
1. An RF MEMS switch with a differential gap between electrodes for high isolation and low voltage operation
2. Design of a capacitive MEMS double beam switch using dynamic pull-in actuation at very low voltage
3. Dynamic pull-in phenomenon in MEMS resonators
4. Dynamics and Global Stability of Beam-based Electrostatic Microactuators
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