Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement-Reference-Cited by-同舟云学术

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Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement

Published:2019-11-05 Issue:12 Volume:29 Page:124006
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Setiono Andi^ORCID,Nyang’au Wilson Ombati^ORCID,Fahrbach Michael,Xu Jiushuai^ORCID,Bertke Maik^ORCID,Wasisto Hutomo Suryo^ORCID,Peiner Erwin^ORCID

Funder

European Union’s Horizon 2020 research and innovation programme

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

https://iopscience.iop.org/article/10.1088/1361-6439/ab4e29/pdf

Reference38 articles.

1. Piezoresistive cantilevers for nanomechanical sensing

2. Integrated microcantilevers for high-resolution sensing and probing

3. A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

4. Enhanced performance of pocket-sized nanoparticle exposure monitor for healthy indoor environment

5. Handheld personal airborne nanoparticle detector based on microelectromechanical silicon resonant cantilever

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Replicating Spectral Baseline for Unambiguous Frequency Locking in Resonant Sensors;Sensors;2024-04-05

2. Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps;Journal of Sensors and Sensor Systems;2023-01-20

3. Real-Time Operation of Microcantilever-Based in-Plane Resonators Partially Immersed in a Microfluidic Sampler;2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS);2023-01-15

4. Anti-resonance Suppression on A Quartz Crystal Microbalance Sensor for Biosensing Applications;2022 International Conference on Radar, Antenna, Microwave, Electronics, and Telecommunications (ICRAMET);2022-12-06

5. MEMS thermal-piezoresistive resonators, thermal-piezoresistive oscillators, and sensors;Microsystem Technologies;2022-11-05

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