Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps-Reference-Cited by-同舟云学术

Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps

Published:2023-01-20 Issue:1 Volume:12 Page:9-19
ISSN:2194-878X
Container-title:Journal of Sensors and Sensor Systems
language:en
Short-container-title:J. Sens. Sens. Syst.

Author:

Distler Johanna,Wöhrl Thomas,Werner Robin,Gerlach Michael,Gollner Michael,Linseis Florian,Kita Jaroslaw,Moos Ralf

Abstract

Abstract. In this paper, the first steps towards integrating a mass sensing system into an existing miniaturized ceramic DSC (differential scanning calorimetry) chip are presented. A vibration setup is developed based on the mass-dependent change in frequency of the DSC chip as an oscillating cantilever. A simulation model reveals that the resolution of the measurement can be improved by reducing the chip thickness. In this study, different measurement methods (acoustic, optical, and piezoresistive) are investigated. Three complete measurement systems are set up and evaluated with regard to their integration in the DSC chip. All presented measurement methods show promising results and already allow mass measurements with a resolution of 100 µg.

Funder

Bayerische Forschungsstiftung

Publisher

Copernicus GmbH

Subject

Electrical and Electronic Engineering,Instrumentation

Link

https://jsss.copernicus.org/articles/12/9/2023/jsss-12-9-2023.pdf

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