TiO2/GeOxNystacked gate dielectrics for Ge-MOSFETs-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

TiO2/GeOxNystacked gate dielectrics for Ge-MOSFETs

Published:2007-11-19 Issue:12 Volume:22 Page:1352-1361
ISSN:0268-1242
Container-title:Semiconductor Science and Technology
language:
Short-container-title:Semicond. Sci. Technol.

Author:

Bera M K,Mahata C,Chakraborty A K,Nandi S K,Tiwari Jitendra N,Hung Jui-Yi,Maiti C K

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference35 articles.

1. Applications of Silicon?Germanium Heterostructure Devices

2. Nanoscale germanium MOS Dielectrics-part I: germanium oxynitrides

3. Germanium MOS capacitors incorporating ultrathin high-/spl kappa/ gate dielectric

4. Distinctly different thermal decomposition pathways of ultrathin oxide layer on Ge and Si surfaces

Cited by 32 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. An investigation of dielectric properties of ultrathin TiOx-SiOx nanocomposite layers on Si substrate;Journal of Materials Science: Materials in Electronics;2023-02

2. Reduced extrinsic recombination process in anatase and rutile TiO2 epitaxial thin films for efficient electron transport layers;Scientific Reports;2021-03-24

3. Evolution of TiOx-SiOx nano-composite during annealing of ultrathin titanium oxide films on Si substrate;Ceramics International;2020-08

4. Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes;Thin Solid Films;2020-05

5. Comparative investigation on NH3-plasma treating different surfaces of stack-gate dielectric Ge MOS capacitors;Applied Physics Express;2020-01-08

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3