Focused ion beam milling for the fabrication of 160 nm channel length IGZO TFTs on flexible polymer substrates
Author:
Funder
Deutsche Forschungsgemeinschaft
European Regional Development Fund
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials
Link
https://iopscience.iop.org/article/10.1088/2058-8585/ab639f/pdf
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4. Ultrashort 15-nm flexible radio frequency ITO transistors enduring mechanical and temperature stress;Science Advances;2022-12-23
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