Hydrogen passivation and reactivation of the Al-acceptors in p-type 6H-SiC
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Reference12 articles.
1. Hydrogen incorporation in boron-doped 6H-SiC CVD epilayers produced using site-competition epitaxy
2. Hydrogen passivation of donors and acceptors in SiC
3. Hydrogen passivation of silicon carbide by low-energy ion implantation
4. Ru Schottky Barrier Contacts to n- and p-type 6H-SiC
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4. Improvement of Carrier Lifetimes in Highly Al-Doped p-Type 4H-SiC Epitaxial Layers by Hydrogen Passivation;Applied Physics Express;2013-12-01
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