X-ray beam induced current/microprobe x-ray fluorescence: synchrotron radiation based x-ray microprobe techniques for analysis of the recombination activity and chemical nature of metal impurities in silicon
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,General Materials Science
Link
http://stacks.iop.org/0953-8984/16/i=2/a=017/pdf
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1. Iron contamination in silicon technology
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4. Electrical and structural properties of nanoscaleNiSi2precipitates in silicon
5. Electrical and Recombination Properties of Copper‐Silicide Precipitates in Silicon
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