Subject
General Physics and Astronomy,General Engineering
Cited by
7 articles.
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1. Compound Semiconductors: Defect Evolution;Encyclopedia of Materials: Science and Technology;2001
2. Modification of AmBv Semiconductor Layers by Ion Implantation;MRS Proceedings;1993
3. Ion implantation in III–V compounds;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-05
4. Rapid isothermal processing of silicon wafers;Physics in Technology;1986-11
5. Rapid annealing of ion-implanted GaAs;physica status solidi (a);1986-04-16