Design and characterization of a resonant triaxial microprobe-Reference-Cited by-同舟云学术

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Design and characterization of a resonant triaxial microprobe

Published:2015-10-30 Issue:12 Volume:25 Page:125011
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Goj Boris,Dressler Lothar,Hoffmann Martin

Funder

Bundesministerium fur Wirtschaft und Technologie

Deutsche Forschungsgemeinschaft

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/25/i=12/a=125011/pdf

Reference23 articles.

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nano Precision Noncontact Probing System Using Tungsten Ball Tip for High Aspect Ratio Structures With Horizontal Internal Dimensions Below 100 μm;IEEE Transactions on Instrumentation and Measurement;2024

2. High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork;International Journal of Precision Engineering and Manufacturing;2023-08-07

3. Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review;Metrology;2023-04-17

4. Development of a two-step stylus with elastic hinge for microstructure measurement to improve sensitivity and vibration characteristics;Precision Engineering;2023-03

5. Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review;Metrology;2022-01-20

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