Development of a two-step stylus with elastic hinge for microstructure measurement to improve sensitivity and vibration characteristics-Reference-Cited by-同舟云学术

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Development of a two-step stylus with elastic hinge for microstructure measurement to improve sensitivity and vibration characteristics

Published:2023-03 Issue: Volume:80 Page:72-81
ISSN:0141-6359
Container-title:Precision Engineering
language:en
Short-container-title:Precision Engineering

Author:

Murakami Hiroshi^ORCID,Murakami Hiroki,Katsuki Akio,Sajima Takao,Uchiyama Kosuke

Funder

Japan Society for the Promotion of Science

JST

Publisher

Elsevier BV

Subject

General Engineering

Reference30 articles.

1. Review of additive electrochemical micro-manufacturing technology;Li;Int J Mach Tool Manufact,2022

2. Nanomanufacturing—perspective and applications;Fang;CIRP Annals,2017

3. Electromagnetic analysis for optical coherence tomography based through silicon vias metrology;Iff;Appl Opt,2019

4. Dimensional metrology for high-aspect-ratio micronozzles;Laboratory,2014

5. Comparing the probing systems of coordinate measurement machine: scanning probe versus touch-trigger probe;Bastas;Measurement,2020

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development of Elastic Diaphragm Structure for Ultralow Stiffness Probe and Mechanical Properties Testing Method;IEEE Sensors Journal;2024-04-01

2. Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings;Applied Sciences;2023-01-17

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