High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork-Reference-Cited by-同舟云学术

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High Precision and Low Force Resonant Probe Based on Quartz Tuning Fork

Published:2023-08-07 Issue:11 Volume:24 Page:2073-2082
ISSN:2234-7593
Container-title:International Journal of Precision Engineering and Manufacturing
language:en
Short-container-title:Int. J. Precis. Eng. Manuf.

Author:

Huang Qiangxian,Wang Wenqian,Wang Guangpu,Cheng Rongjun^ORCID,Zhang Liansheng,Li Hongli,Li Ruijun

Funder

National Key Research and Development Project of China under Grant

Anhui Provincial Natural Science Foundation

National Natural Science Foundation of China under Grant

Publisher

Springer Science and Business Media LLC

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

https://link.springer.com/content/pdf/10.1007/s12541-023-00862-z.pdf

Reference25 articles.

1. Alain, V., Hichem, N., Mohamed, D., et al. (2015). Implementation of capacitive probes for ultra-high precision machine for cylindricity measurement with nanometre level of accuracy. International Journal of Precision Engineering and Manufacturing., 16(5), 883–893.

2. Ahn, H. K., Kang, H., Ghim, Y. S., et al. (2019). Touch probe tip compensation using a novel transformation algorithm for coordinate measurements of curved surfaces. International Journal of Precision Engineering and Manufacturing., 20(2), 193–199.

3. Kao, S. M., & Sheu, D. Y. (2013). Developing a novel tri-switch tactile probing structure and its measurement characteristics on micro-cmm. Measurement, 46(9), 3019–3025.

4. Dai, G., Koenders, L., Fluegge, J., & Hemmleb, M. (2018). Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology. Measurement Science and Technology, 29, 054012.

5. Feng, K., Cui, J., Dang, H., Zhang, H., Zhao, S., & Tan, J. (2016). Four-cores FBG probe based on capillary self-assembly fabrication technique for 3D measurement. IEEE Photonics Technology Letters, 28(21), 2339–2342.

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