Developing a novel tri-switch tactile probing structure and its measurement characteristics on micro-CMM-Reference-Cited by-同舟云学术

Developing a novel tri-switch tactile probing structure and its measurement characteristics on micro-CMM

Published:2013-11 Issue:9 Volume:46 Page:3019-3025
ISSN:0263-2241
Container-title:Measurement
language:en
Short-container-title:Measurement

Author:

Kao Shin-Min,Sheu Dong-Yea

Publisher

Elsevier BV

Subject

Applied Mathematics,Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation

Reference10 articles.

1. Probing systems for dimensional micro- and nano-metrology;Weckenmann;Meas. Sci. Technol.,2006

2. Ultraprecision micro-CMM using a low force 3D touch probe;Kung;Meas. Sci. Technol.,2007

3. A vibration micro-scale CMM probe for measuring high aspect ratio structure;Claverley;Microsyst. Technol.,2010

4. C.C. Cheng, J.K. Huang, D.Y. Sheu, Development of gluing and assembling process on micro EDM to fabricate micro spherical stylus tips for micro CMM, in: The Sixth International Conference on MicroManufacturing ICOMM/2011 March 7–10 2011, Tokyo, Japan, Conf. Proceedings, pp. 219–222.

5. Development of a low-cost micro-CMM for 3D micro/nano measurements;Fan;Meas. Sci. Technol.,2006

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