Fast and accurate: high-speed metrological large-range AFM for surface and nanometrology
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://iopscience.iop.org/article/10.1088/1361-6501/aaaf8a/pdf
Reference22 articles.
1. Surface Studies by Scanning Tunneling Microscopy
2. Atomic Force Microscope
3. A metrological large range atomic force microscope with improved performance
4. Accurate and traceable calibration of two-dimensional gratings
5. Adaptive AFM scan speed control for high aspect ratio fast structure tracking
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