X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates-Reference-Cited by-同舟云学术

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X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

Published:2010-06-14 Issue:7 Volume:20 Page:075031
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Klymyshyn David M,Mappes Timo,Achenbach Sven,Kachayev Anton,Börner Martin,Mohr Jürgen

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Microwave acoustic materials, devices, and applications

2. Optimal cut for leaky SAW on LiTaO/sub 3/ for high performance resonators and filters

3. Suppression of the leaky SAW attenuation with heavy mechanical loading

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Hard X-rays meet soft matter: when bottom-up and top-down get along well;Soft Matter;2012

2. Fabrication of a GHz band surface acoustic wave filter by UV-nanoimprint with an HSQ stamp;Journal of Micromechanics and Microengineering;2011-03-17

3. Hard x-ray nano patterning using a sectioned multilayer;Journal of Applied Physics;2011-02-15

4. Hard X-ray microbeam lithography using a Fresnel zone plate with a long focal length;Journal of Synchrotron Radiation;2010-12-02

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