Fabrication of a GHz band surface acoustic wave filter by UV-nanoimprint with an HSQ stamp-Reference-Cited by-同舟云学术

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Fabrication of a GHz band surface acoustic wave filter by UV-nanoimprint with an HSQ stamp

Published:2011-03-17 Issue:4 Volume:21 Page:045021
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Chen Nian-Huei,Huang Ju-Chun,Wang Chiu-Yen,Huang Fon-Shan

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Multimode and multifrequency gigahertz surface acoustic wave sensors

2. Very high frequency SAW devices based on nanocrystalline diamond and aluminum nitride layered structure achieved using e-beam lithography

3. X-ray fabrication of SAW resonators with narrow electrodes in thick high-aspect-ratio polymer templates

4. Increasing the maximum operating frequency of SAW filters fabricated using an I-line source

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4. High performance lithium niobate surface acoustic wave transducers in the 4–12 GHz super high frequency range;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11

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