Simulated enhancement of the axial symmetry of a micro lens array with a modified mask by using an excimer laser dragging process
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference15 articles.
1. Micro-Optics
2. Technique for monolithic fabrication of microlens arrays
3. Optical Techniques for the Generation of Microlens Arrays
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2. A study on the fabrication of microlens array based on the volume shrinkage of the photoresist solution during evaporation;Optics Communications;2014-12
3. Excimer laser micromachining of aspheric microlens arrays based on optimal contour mask design and laser dragging method;Optics Express;2012-02-27
4. A study on the fabrication of rounded patterns by spin coating of photoresist on silicon substrate with microstructures;Polymer Engineering & Science;2011-09-22
5. Simulated fabrication of off-axis microlens array using excimer laser dragging process;Journal of Laser Applications;2006-11
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