Micro-structuring of thick NdFeB films using high-power plasma etching for magnetic MEMS application-Reference-Cited by-同舟云学术

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Micro-structuring of thick NdFeB films using high-power plasma etching for magnetic MEMS application

Published:2011-03-04 Issue:4 Volume:21 Page:045011
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Jiang Yonggang,Masaoka Shingo,Uehara Minoru,Fujita Takayuki,Higuchi Kohei,Maenaka Kazusuke

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference12 articles.

1. Electrodeposited Co–Pt micron-size magnets with strong perpendicular magnetic anisotropy for MEMS applications

2. Electrodeposited Co-Pt permanent micromagnet arrays on Cu[111]-Si[110] substrates

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4. Microfabrication of Sm2Co17 micromagnets for MEMS and micromotors using ultrashort pulsed hydro laser micromilling process;The International Journal of Advanced Manufacturing Technology;2023-11-13

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