Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers-Reference-Cited by-同舟云学术

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Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometers

Published:2009-02-23 Issue:3 Volume:19 Page:035025
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Yun Sung-Sik,Jeong Dae-Hun,Wang Se-Myung,Je Chang-Han,Lee Myung-Lae,Hwang Gunn,Choi Chang-Auk,Lee Jong-Hyun

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. Sensing Tilt With MEMS Accelerometers

2. Markets and applications for MEMS inertial sensors

3. Micromachined inclinometer with high sensitivity and very good stability

4. An optimized MEMS-based electrolytic tilt sensor

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1. Effects of Natural Aging in Biaxial MEMS Accelerometers;IEEE Sensors Journal;2021-01-15

2. Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces;Journal of Crystal Growth;2020-02

3. Selected Aging Effects in Triaxial MEMS Accelerometers;Journal of Sensors;2019-11-18

4. Microgravity Generation Using Tilting Board for Resolution Evaluation of MEMS Accelerometer;Sensors and Materials;2018-12-18

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