Metalorganic chemical vapor deposition of aluminum nitride on vertical surfaces
Author:
Funder
European Space Agency
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference42 articles.
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1. Metalorganic Chemical Vapor Deposition of AlN on High Degree Roughness Vertical Surfaces for MEMS Fabrication;Advanced Electronic Materials;2024-01-15
2. In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS;Advanced Electronic Materials;2023-07-03
3. Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS;Materials Today Communications;2022-12
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5. Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls;Journal of Vacuum Science & Technology A;2021-05
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