An optimized MEMS-based electrolytic tilt sensor

Author:

Jung Ho,Kim Chang Jin,Kong Seong Ho

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. On a micromachined fluidic inclinometer;Yotter;Transducer’03,2003

2. S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Freeh, J. Auber, W. Lang, A Convection-based Micromachined Inclinometer using SOI Technology, in Proc. MEMS Conf. (2001) 159–161.

3. Convection-based accelerometer and tilt sensor implemented in standard CMOS;Milanovi,1998

4. L. Volker, The Electrochemistry of Silicon : Instrumentaion, Sensors and Applications, Wiley press, (2002).

5. E. Palecek, F. Scheller, J. Wang, Electrochemistry of Nucleic Acids and Proteins, Elsevier, (2005).

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