Development behaviours and microstructure quality of downward-development in deep x-ray lithography
Author:
Publisher
IOP Publishing
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials
Reference14 articles.
1. Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)
2. Deep X-ray lithography for the production of three-dimensional microstructures from metals, polymers and ceramics
3. Characterisation of defects in very high deep-etch X-ray lithography microstructures
4. Ultrasonic supported development of irradiated micro-structures
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