Analysis of the natural frequency of a quartz double-end tuning fork with a new deformation model-Reference-Cited by-同舟云学术

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Analysis of the natural frequency of a quartz double-end tuning fork with a new deformation model

Published:2016-04-27 Issue:6 Volume:26 Page:065006
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Huang Bo-Shiun,Chang-Chien Wen-Tien,Hsieh Fa-Hwa,Chou Yuan-Fang,Chang Chia-Ou

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Link

http://stacks.iop.org/0960-1317/26/i=6/a=065006/pdf

Reference29 articles.

1. Anisotropic etching of Z-cut quartz

2. Etch rates of crystallographic planes inZ-cut quartz - experiments and simulation

3. A piezoelectrically operated optical chopper by quartz micromachining

4. Anisotropy-independent through micromachining of quartz resonators by ion track etching

5. Analytical and finite element method design of quartz tuning fork resonators and experimental test of samples manufactured using photolithography 2: comprehensive analysis of resonance frequencies using Sezawa's approximations

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1. Design, fabrication, and characterization of a high-sensitivity integrated quartz vibrating beam accelerometer;Review of Scientific Instruments;2024-03-01

2. Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis;Micromachines;2021-05-07

3. High-Stability Quartz Resonant Accelerometer With Micro-Leverages;Journal of Microelectromechanical Systems;2021-04

4. Research on a Micro-Processing Technology for Fabricating Complex Structures in Single-Crystal Quartz;Micromachines;2020-03-24

5. Analysis of the Frequency Shift versus Force Gradient of a Dynamic AFM Quartz Tuning Fork Subject to Lennard-Jones Potential Force;Sensors;2019-04-25

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