Author:
Lee Sungkyu,Moon Yangho,Lee Jaekyu,Yoon Jeongho,Moon Ji-Hoon,Kim Jong-hee,Yoo Seung-Hyun,Chung Hyungsik
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
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5. Fabrication of an array of surface mount device 32.768kHz quartz tuning fork-type crystals: photolithography and selective etching of an array of quartz tuning fork resonators with subsequent photoresist spray coating
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